Equipment-Mounted On-Device AI Platform: DutchBoy S is a small server form factor that attaches to the side of semiconductor etching equipment, characterized by its real-time data interface with process equipment. It performs deep learning analysis immediately on-site without cloud transmission, providing anomaly detection, alarms, and dashboard visualization in milliseconds. This on-device AI architecture allows on-site engineers to quickly understand and respond to abnormal situations without network delays.
Deep Learning-Based Correlation Analysis: AI based on process mechanism modeling comprehensively analyzes hundreds of sensor data points, identifying multi-dimensional correlations that are easily missed by human engineers. For example, it learns patterns that appear due to subtle combinations of changes in temperature, pressure, RF power, etc., and infers relationships such as "simultaneous fluctuation of X sensor and Y sensor → occurrence of a specific defect." This enables much more accurate anomaly detection than existing rule-based anomaly detection (which only alerts when thresholds are exceeded).
Automatic Defect Cause Diagnosis: In the past, when defects occurred on wafers, engineers had to search through various logs to trace the cause. DutchBoy S learns characteristic patterns for each defect type, and when an anomaly is detected, it presents potential cause sensors/process variables in order of priority.
For example, it informs "Subtle vibration of chamber pressure sensor #5 -> possibility of causing etching non-uniformity defect," helping engineers quickly find and address the problem area. It is like AI reproducing the intuition of a veteran engineer in real time.
Intuitive On-Site Dashboard: Analysis results are visualized in real-time on a dashboard screen installed on-site. Multi-dimensional sensor correlation graphs, anomaly occurrence times, and expected defect types are displayed in an easy-to-understand manner, and warnings are immediately displayed on-site when anomalies occur.
This visual feedback greatly helps engineers quickly understand and respond to problem situations. It significantly increases the speed of decision-making compared to the traditional method of humans interpreting text logs or complex graphs, reducing equipment downtime.
Application Scalability and Learning Improvement: The DutchBoy S platform is designed to be scalable to various process equipment such as deposition and lithography in addition to semiconductor etching. Even if the number or type of sensors changes, it can be addressed by training modular AI models.
In addition, the AI model iscontinuously learningwith data accumulated during use, optimizing it for a specific fab (factory) or recipe. Its superior accuracy and insight over time compared to humans is a key advantage. This feature means that it can be customized and applied not only to semiconductors but also to continuous process industries such as secondary batteries and petrochemicals.